Scanning Electron Microscope (SEM)

Aspex PSEM eXpress

Microscopy

Characterisation

Ceramic, glasses, metal, polymers and semiconductor

4 inch diameter wafers

Scale:

Function:

Fabrication step:

Material:

Use:

Imaging including channel / feature geometries for process control, quality assurance and product validation

The Aspex PSEM eXpress benchtop scanning electron microscope (SEM) provides simple operation with an intuitive user interface. No special sample preparation (such as coating or drying) is required. The SEM operates in both low and high vacuum modes and has four settings for accelerating voltage (5, 10, 15 and 20keV).

It is suitable for a variety of applications depending upon material: high vacuum for conducting (or coated) samples or fixed variable pressure for non-metallic samples. The large stage allows travel of up to 80mm by 120mm and a magnification of up to 40,000 times is possible.

80 mm x 100 mm stage travel, Variable Pressure option (low vacuum analysis for minimal preparation)