Optical Profilometer

Wyko NT9100

Clean rooms and associated equipment

Micro and nano fabrication

Ceramic, glasses, metal, polymers and semiconductors

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Imaging including 3D imaging of channel geometries for process control quality assurance and product validation

The NT9100 Wyko optical profilometer through coherence scanning interferometry provides fast, accurate and repeatible output. It is used to measure step heights, roughness and surface topography of components from sub nanometer to millimeter-high steps in the z dimension.

Measurements can be made on a number of materials namely: metals, MEMS, semiconductors and optics. The motorized stage allows high resolution measurements over a larger field of view using a data stitching option.