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Welcome to the South Australian Node of the Australian National Fabrication Facility
Microfluidics & etching
Micro and nano fabrication
6 inch diameter wafers
The PlasmaTech V50 plasma asher is used primarily for ashing photoresist materials from substrates used in the fabrication of microfluidic devices.
This process is done under vacuum in order to create a plasma. The system can be also used be used for other surface treatments.
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