Plasmer asher

PlasmaTech V50

Microfluidics & etching

Micro and nano fabrication

Any

6 inch diameter wafers

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The PlasmaTech V50 plasma asher is used primarily for ashing photoresist materials from substrates used in the fabrication of microfluidic devices.

This process is done under vacuum in order to create a plasma. The system can be also used be used for other surface treatments.